Funder
National Research Foundation on Korea
Subject
General Physics and Astronomy,General Materials Science
Reference15 articles.
1. Plasmonics beyond the diffraction limit;Gramotnev;Nat. Phot.,2010
2. Plasmonics: future outlook;Kawata;Jpn. J. Appl. Phys.,2013
3. Resolution limit in plasmonic lithography for practical applications beyond 2x-nm half pitch;Kim;Adv. Mater.,2012
4. Maskless plasmonic lithography at 22 nm resolution;Pan;Sci. Rep.,2011
5. Two-surface-plasmon-polariton-absorption based lithography using 400 nm femtosecond laser;Li;Appl. Phys. Lett.,2014
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