Author:
Kim Sang-Kon,Lee Ji-Eun,Park Seung-Wook,Oh Hye-Keun
Subject
General Physics and Astronomy,General Materials Science
Reference7 articles.
1. C.A. Mack, Inside PROLITH: A Compreshensive Guide to Optical Lithography Simulation, FINLE Technologies, Austin, 1997.
2. LAVA web-based remote simulation: enhancements for education and technology innovation
3. http://www.kla-tencor.com.
4. http://www.solid-c.de.
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