Structural and physical properties of ZnO:Al films grown on glass by direct current magnetron sputtering with the oblique target
Author:
Publisher
Elsevier BV
Subject
General Physics and Astronomy,General Materials Science
Reference25 articles.
1. Study of structural and electrical properties of grain-boundary modified ZnO films prepared by sol–gel technique
2. Metal-like conductivity in transparent Al:ZnO films
3. High conductivity and transparent ZnO:Al films prepared at low temperature by DC and MF magnetron sputtering
4. Comparative material study on RF and DC magnetron sputtered ZnO:Al films
5. Effect of deposition geometry on structural, electrical and optical properties of ZnO:Al films by magnetron sputtering
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4. Effects of Target Angle on the Properties of Aluminum Doped Zinc Oxide Films Prepared by DC Magnetron Sputtering for Thin Film Solar Cell Applications;Journal of Nanoscience and Nanotechnology;2014-10-01
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