Efficient implementation of multiple drive-in steps in thermal diffusion of phosphorus for PERC solar cells
Author:
Funder
KETEP
Ministry of Trade, Industry & Energy, Republic of Korea
Publisher
Elsevier BV
Subject
General Physics and Astronomy,General Materials Science
Reference15 articles.
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4. Limitation of industrial phosphorus-diffused emitters by SRH recombination;Min;Energy Procedia,2014
5. Simulation of emitter doping profiles formed by industrial POCl3 processes;Abbott,2013
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1. A novel phosphorus diffusion process for front-side P–N junction fabrication in PERC solar cells;Materials Science in Semiconductor Processing;2024-09
2. Upright pyramids vs. inverted pyramids surface textures: a comparative investigation on the electrical properties of PERC solar cells;Journal of Materials Science: Materials in Electronics;2023-01
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4. Enhanced performance of solar cell with n+ emitter by SiO2 nanospheres assisted liquid phosphorus diffusion;Solar Energy;2021-07
5. Influence of SiO2 nanosphere on the performance of n+ layer fabricated by phosphorus diffusion using phosphoric acid solution;Applied Physics A;2018-09-15
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