Author:
Han S.W.,Lee H.W.,Lee H.J.,Kim J.Y.,Kim J.H.,Oh C.S.,Choa S.H.
Subject
General Physics and Astronomy,General Materials Science
Reference8 articles.
1. Comparison of the Young’s modulus of polysilicon film by tensile testing and nanoindentation
2. Bulge Test on Free Standing Gold Thin Films
3. W.N. Sharpe Jr., B. Yuan, R. Vaidyanathan, in: Proceedings of IEEE International Workshop on Microelectromechanical Systems, 1997, pp. 424–429.
Cited by
27 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献