Low dielectric constant polymers for microelectronics-Reference-Cited by-同舟云学术

Low dielectric constant polymers for microelectronics

Published:2001-02 Issue:1 Volume:26 Page:3-65
ISSN:0079-6700
Container-title:Progress in Polymer Science
language:en
Short-container-title:Progress in Polymer Science

Author:

Maier G

Publisher

Elsevier BV

Subject

Materials Chemistry,Organic Chemistry,Polymers and Plastics,Surfaces and Interfaces,Ceramics and Composites

Reference248 articles.

1. Semiconductor Industry Association. International Technology Roadmap for Semiconductors (ITRS), 1998 Update (http://www.itrs.net/ntrs/publntrs.nsf).

2. http://www.research.ibm.com/research/technology/html.

3. Process Integration and Manufacturasility Issues for High Performance Multilevel Interconnect

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