Operational testing of L.S.I. arrays by stroboscopic scanning electron microscopy-Reference-Cited by-同舟云学术

Operational testing of L.S.I. arrays by stroboscopic scanning electron microscopy

Published:1971-10 Issue:5 Volume:10 Page:317-318
ISSN:0026-2714
Container-title:Microelectronics Reliability
language:en
Short-container-title:Microelectronics Reliability

Author:

Plows G.S.,Nixon W.C.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Safety, Risk, Reliability and Quality,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference14 articles.

1. Stroboscopic scanning electron microscopy

2. Device failure analysis by scanning electron microscopy

3. Surface Electric Potential, Surface Electric Fields and Scanning Electron Miscroscope Contrast;Plows,1970

4. On the Observation and Measurement of Specimen Surface Voltages in the Scanning Electron Microscope;Plows,1970

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