Growth of aligned CNx nanocolumns on silicon by RF-magnetron sputtering
Author:
Publisher
Elsevier BV
Subject
General Chemistry,General Materials Science
Reference8 articles.
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2. Growth of fullerene-like carbon nitride thin solid films by reactive magnetron sputtering; role of low-energy ion irradiation in determining microstructure and mechanical properties;Neidhardt;J Appl Phys,2003
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2. Crystalline carbon nitride film synthesized by ion beam assisted magnetron sputtering and thermal annealing in nitrogen gas;Diamond and Related Materials;2015-05
3. Structure evolution from nanocolumns to nanoporous of nitrogen doped amorphous carbon films deposited by magnetron sputtering;Applied Surface Science;2010-09
4. Preparation and characterisation of carbon nitride films deposited by pulsed laser arc deposition;International Journal of Surface Science and Engineering;2010
5. Magnetron sputtering deposition of carbon nitride nanocolumns at low temperature;Journal of Physics D: Applied Physics;2009-09-02
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