Growth of fullerene-like carbon nitride thin solid films by reactive magnetron sputtering; role of low-energy ion irradiation in determining microstructure and mechanical properties-Reference-Cited by-同舟云学术

Growth of fullerene-like carbon nitride thin solid films by reactive magnetron sputtering; role of low-energy ion irradiation in determining microstructure and mechanical properties

Published:2003-03 Issue:5 Volume:93 Page:3002-3015
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:Journal of Applied Physics

Author:

Neidhardt J.,Czigány Zs.,Brunell I. F.,Hultman L.

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://aip.scitation.org/doi/pdf/10.1063/1.1538316

Reference37 articles.

1. How hard is fullerene-like CNx? Some observations from the nanoindentation response of a magnetron-sputtered coating

2. Mechanical and tribological properties of CNx films deposited by reactive magnetron sputtering

3. Cross-Linked Nano-onions of Carbon Nitride in the Solid Phase: Existence of a NovelC48N12Aza-Fullerene

4. Superhard and Elastic Carbon Nitride Thin Films Having Fullerenelike Microstructure

5. Mass and energy resolved detection of ions and neutral sputtered species incident at the substrate during reactive magnetron sputtering of Ti in mixed Ar+N2 mixtures

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