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Metal induced charge transfer doping in graphene-ruthenium hybrid interconnects

  • Published:2021-10 Issue: Volume:183 Page:999-1011
  • ISSN:0008-6223
  • Container-title:Carbon
  • language:en
  • Short-container-title:Carbon

Author:

Achra Swati,Wu Xiangyu,Trepalin Vadim,Nuytten Thomas,Ludwig Jonathan,Afanas'ev Valeri,Brems Steven,Sorée Bart,Tokei Zsolt,Heyns Marc,Asselberghs Inge

Funder

Horizon 2020

Interuniversity Micro-Electronic Centre

Katholieke Universiteit Leuven

Publisher

Elsevier BV

Subject

General Chemistry,General Materials Science

Reference91 articles.

1. A roadmap for graphene,;Novoselov;Nature,2012

2. Micrometer-scale ballistic transport in encapsulated graphene at room temperature;Mayorov;Nano Lett.,2011

3. Room-temperature quantum hall effect in graphene, Science (80-. );Novoselov;315,2007

4. Thermal properties of graphene and nanostructured carbon materials;Balandin;Nat. Mater.,2011

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1. Graphene-All-Around Cobalt Interconnect with a Back-End-of-Line Compatible Process;Nano Letters;2024-01-31

2. Technology/Memory Co-Design and Co-Optimization Using E-Tree Interconnect;Proceedings of the Great Lakes Symposium on VLSI 2023;2023-06-05

3. Ultrascaled graphene-capped interconnects: a quantum mechanical study;2023 IEEE International Interconnect Technology Conference (IITC) and IEEE Materials for Advanced Metallization Conference (MAM)(IITC/MAM);2023-05

4. Structural analysis of graphene-capped copper by spectroscopic ellipsometry for humidity reliability assessment;Japanese Journal of Applied Physics;2023-03-17

5. Graphene-Based Interconnect Exploration for Large SRAM Caches for Ultrascaled Technology Nodes;IEEE Transactions on Electron Devices;2023-01
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