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Modeling and a cross-coupling compensation control methodology of a large range 3-DOF micropositioner with low parasitic motions

  • Published:2021-08 Issue: Volume:162 Page:104334
  • ISSN:0094-114X
  • Container-title:Mechanism and Machine Theory
  • language:en
  • Short-container-title:Mechanism and Machine Theory

Author:

Al-Jodah Ammar,Shirinzadeh Bijan,Ghafarian Mohammadali,Das Tilok Kumar,Pinskier Joshua,Tian Yanling,Zhang Dawei

Funder

Australian Research Council

Publisher

Elsevier BV

Subject

Computer Science Applications,Mechanical Engineering,Mechanics of Materials,Bioengineering

Cited by 22 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Large stroke electromagnetic redundant actuated six degrees-of-freedom parallel compliant micropositioning stage;Journal of Micromechanics and Microengineering;2024-07-11

2. Identification and Compensation of the Flexure-Induced Motion Error with a Voice Coil Motor;International Journal of Precision Engineering and Manufacturing;2024-06-29

3. A novel F-shaped linear guiding mechanism based compliant positioning stage with restricted parasitic motion;Precision Engineering;2024-06

4. Modeling and Inverse Compensation for Coupled Hysteresis of an XYΘ-Type Flexure-Based Mechanism;2024 36th Chinese Control and Decision Conference (CCDC);2024-05-25

5. Design and Analysis of a Piezo-based Decoupled 3-DOF (XYθ) Micropositioner with Large Workspace;2023 26th International Conference on Computer and Information Technology (ICCIT);2023-12-13
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