Author:
Hu Rong,Huang Yu-Fang,Wu Xing,Qian Bin,Wang Ling,Zhang Zi-Qi
Funder
Applied Basic Research Key Project of Yunnan
National Natural Science Foundation of China
Reference70 articles.
1. Using intelligent technology and real-time feedback algorithm to improve manufacturing process in IoT semiconductor industry;Li;J. Supercomput.,2021
2. A copula-based hybrid estimation of distribution algorithm for m-machine reentrant permutation flow-shop scheduling problem;Qian;Appl. Soft Comput.,2017
3. Human–machine collaboration for improving semiconductor process development;Kanarik;Nature,2023
4. Atomic layer etching applications in nano-semiconductor device fabrication;Kim;Electron. Mater. Lett.,2023
5. Silicon rings and silicon electrodes for etching market 2022 - Global analysis and forecasts by type, application, regions, trends, growth and market size. accessed from " https://www.imrmarketreports.com/reports/silicon-rings-and-silicon-electrodes-for-etching-market/" on November 12, 2023.
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