Temperature studies of optical birefringence and X-ray diffraction with poly(p-xylylene), poly(chloro-p-xylylene) and poly(tetrafluoro-p-xylylene) CVD thin films-Reference-Cited by-同舟云学术

Temperature studies of optical birefringence and X-ray diffraction with poly(p-xylylene), poly(chloro-p-xylylene) and poly(tetrafluoro-p-xylylene) CVD thin films

Published:2000-03 Issue:7 Volume:41 Page:2379-2390
ISSN:0032-3861
Container-title:Polymer
language:en
Short-container-title:Polymer

Author:

Senkevich J.J.,Desu S.B.,Simkovic V.

Publisher

Elsevier BV

Subject

Polymers and Plastics,Materials Chemistry,Organic Chemistry

Reference64 articles.

1. Advertisers in This Issue

2. ACS Symp Ser: Microelect Tech;Hu;Ser,1995

3. Investigations of The Low Dielectric Constant Fluorinated Polyimide for Use as The Interlayer Dielectric in ULSI

4. Fluorinated, Low Thermal Expansion Coefficient Polyimides For Interlayer Dielectric Application: Thermal Stability, Refractive Index And High Temperature Modulus Measurements

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