AFM-based 3D Nanofabrication Using Ultrasonic Vibration Assisted Nanomachining
Author:
Publisher
Elsevier BV
Subject
Artificial Intelligence,Industrial and Manufacturing Engineering
Reference27 articles.
1. Ali M, Wagner T, Shakoor M, Molian PA. Review of laser nanomachining. Journal of Laser Applications 2008; 20(3): 169-184.
2. Berenschot EJ, Jansen HV, Tas NR. Fabrication of 3D fractal structures using nanoscale anisotropic etching of single crystalline silicon. Journal of micromechanics and microengineering 2013; 23(5): 055024.
3. Berenschot EJ, Tas NR, Jansen HV, Elwenspoek M. 3D-nanomachining using corner lithography. In Proceeding of 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 2008, pp. 729-732.
4. Fang TH and Chang WJ. Effects of AFM-based nanomachining process on aluminum surface. Journal of Physics and chemistry of Solids 2003; 64(6): 913-918.
5. Firtel M, Henderson G, Sokolov I. Nanosurgery: observation of peptidoglycan strands in Lactobacillus helveticus cell walls. Ultramicroscopy 2004; 101(2): 105-109.
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