Electrical and Corrosion Properties of Titanium Aluminum Nitride Thin Films Prepared by Plasma-Enhanced Atomic Layer Deposition-Reference-Cited by-同舟云学术

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Electrical and Corrosion Properties of Titanium Aluminum Nitride Thin Films Prepared by Plasma-Enhanced Atomic Layer Deposition

Published:2017-03 Issue:3 Volume:33 Page:295-299
ISSN:1005-0302
Container-title:Journal of Materials Science & Technology
language:en
Short-container-title:Journal of Materials Science & Technology

Author:

Yun Eun-Young,Lee Woo-Jae,Wang Qi Min,Kwon Se-Hun

Funder

Ministry of Science, ICT & Future Planning

Ministry of Industry and Energy

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Polymers and Plastics,Mechanical Engineering,Mechanics of Materials,Ceramics and Composites

Reference27 articles.

1. Electrochemical Mechanism of Atmospheric Rusting

2. Corrosion resistance of TiO2 films grown on stainless steel by atomic layer deposition

3. Microstructure, Interface, and Properties of Multilayered CrN/Cr2O3 Coatings Prepared by Arc Ion Plating

4. Ultra-Thin Aluminium Oxide Films Deposited by Plasma-Enhanced Atomic Layer Deposition for Corrosion Protection

5. FTIR and XPS Studies on Corrosion-resistant SiO2 Coatings as a Function of the Humidity during Deposition

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1. Pulsed electric field treatment reduces the internal stress and increases the adhesion of TiAlN coating;Colloids and Surfaces A: Physicochemical and Engineering Aspects;2024-12

2. Optical and electrophysical properties of nitride TiAlSiN and carbonitride TiAlSiCN coatings: influence of reactive magnetron deposition regimes;Proceedings of the National Academy of Sciences of Belarus. Physics and Mathematics Series;2024-07-10

3. Surface chemistry in atomic layer deposition of AlN thin films from Al(CH₃)₃ and NH₃ studied by mass spectrometry;Journal of Materials Chemistry C;2024

4. Designing hard wear-resistant conductors by introducing high-plasma-energy heterogeneous metals into transition metal nitrides;Journal of Materials Science & Technology;2023-09

5. Release-type bacteriostasis of Cu-bearing stainless steel against planktonic bacteria served in liquid system;Materials Chemistry and Physics;2023-02

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