Development of an on-line isotope dilution laser ablation inductively coupled plasma mass spectrometry (LA–ICP-MS) method for determination of boron in silicon wafers
Author:
Publisher
Elsevier BV
Subject
Analytical Chemistry
Cited by 21 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Quantitative imaging of trace elements in solid samples by online isotope dilution laser ablation-inductively coupled plasma-mass spectrometry;The Analyst;2023
2. Study of nano particle stripping and composition inspection on wafer surface;Acta Physica Sinica;2020
3. Potential use of laser-induced breakdown spectroscopy combined laser cleaning for inspection of particle defect components on silicon wafer;Journal of Micro/Nanolithography, MEMS, and MOEMS;2019-08-27
4. Detection of particle defect components on silicon wafer with laser induced breakdown spectroscopy combined laser cleaning technology;Metrology, Inspection, and Process Control for Microlithography XXXIII;2019-03-26
5. Solution-based calibration strategy for laser ablation–inductively coupled plasma–mass spectrometry using desolvating nebulizer system;Spectrochimica Acta Part B: Atomic Spectroscopy;2018-07
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