Cathodic arc deposition of diamond-like carbon: effect of bias voltage and deposition angle-Reference-Cited by-同舟云学术

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Cathodic arc deposition of diamond-like carbon: effect of bias voltage and deposition angle

Published:1991-07 Issue: Volume:140 Page:780-783
ISSN:0921-5093
Container-title:Materials Science and Engineering: A
language:en
Short-container-title:Materials Science and Engineering: A

Author:

Rother B.,Siegel J.,Mühling I.,Fritzsch H.,Breuer K.

Publisher

Elsevier BV

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Reference10 articles.

1. Cathodic arc evaporation of graphite with controlled cathode spot position

2. Characterization of composite carbon coatings deposited by dc cathodic arc technique

3. Diffraction Studies on Non-crystalline Substances,1981

Cited by 15 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Effect of substrate bias on the properties of DLC films created using a combined vacuum arc;Bulletin of Materials Science;2021-06-08

2. Stability of diamond-like carbon in hydrothermal conditions;Diamond and Related Materials;2006-04

3. Evidence of columnar diamond growth structures within cathode spot craters of vacuum arcs on carbon;Journal of Physics D: Applied Physics;2003-11-25

4. TiN structural modifications induced by bias voltage in a new dynamic controlled magnetron sputtering apparatus;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2001-04

5. Pin-on-disc testing of PE-CVD diamond-like carbon coatings on tool steel substrates;Surface and Coatings Technology;2000-08

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