Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference8 articles.
1. Titanium nitride coating by plasma CVD;Kikuchi,1984
2. Safety Specifications of Tetrakis(diethylamido)titanium—Ti[N(C2H5)2]4—and Tetrakis(dimethylamido)titanium—Ti[N(CH3)2] 4,1990
3. Synthesis of thin films by atmospheric pressure chemical vapor deposition using amido and imido titanium(IV) compounds as precursors;Fix;Chem. Mater.,1990
4. Plasma chemical vapour deposition of TiN;Li;Plasma Chem. Plasma Process.,1984
5. Binäre und ternäre Carbid- und Nitridsysteme der Übergangsmetalle;Holleck,1984
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