Ion-assisted deposition with a new plasma source
Author:
Publisher
Elsevier BV
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference7 articles.
1. Microstructure of optical thin films;Macleod,1982
2. Optical films produced by ion-based techniques;Martin,1986
3. Ion-beam-assisted deposition of thin films;Martin;Appl. Opt.,1983
4. Ion-assisted deposition of lanthanum fluoride thin films;Torgove;Appl. Opt.,1987
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