Author:
Stenzel O.,Harhausen J.,Gäbler D.,Wilbrandt S.,Franke C.,Foest R.,Kaiser N.
Funder
framework of the collaborative research project Plasma und Optische Technologien
Bundesministerium für Bildung und Forschung
BMBF
Fkz
excellent operation and maintenance of the PIAD batch coaters
Subject
Electronic, Optical and Magnetic Materials
Cited by
11 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献