Author:
Kuwahara Kiyoshi,Matsuda Yoshinobu,Fujiyama Hiroshi
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference5 articles.
1. Y. Matsuda, K. Kuwahara and H. Fujiyama, Mater. Sci. Eng. A, in the press.
2. Glow Discharge Processes;Chapman,1980
3. Axial distribution of optical emission in a planar magnetron discharge
4. Introduction to Plasma Physics and Controlled Fusion;Chen,1984
5. Generalization of the model for theJ‐Vcharacteristics of dc sputtering discharges
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