Author:
Klootwijk J.H,Van Kranenburg H,Weusthof M.H.H,Woerlee P.H,Wallinga H
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Safety, Risk, Reliability and Quality,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
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4. Comparison between CVD and thermal oxide dielectric integrity
5. On the electrical conduction in the interpolysilicon dielectric layers
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