5-methyl-1H-benzotriazole as potential corrosion inhibitor for electrochemical-mechanical planarization of copper
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Geotechnical Engineering and Engineering Geology,Condensed Matter Physics
Reference23 articles.
1. Cu planarization in electrochemical mechanical planarization [J];LIU;Journal of the Electrochemical Society,2006
2. Planarization of copper layer for damascene interconnection by electrochemical polishing in alkali-based solution [J];OH;Journal of the Electrochemical Society,2006
3. Study of anodic layers and their effects on electropolishing of bulk and electroplated films of copper [J];HUO;Journal of Applied Electrochemistry,2004
4. Dishing effects during chemical-mechanical polishing of copper in acidic media [J];LUO;Journal of the Electrochemical Society,2000
5. Electrochemical and corrosion behaviors of pure Mg in neutral 1.0% NaCl solution[J];CAI;Transactions of Nonferrous Metals Society of China,2012
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