Ontology-based decision support system for semiconductors EDS testing by wafer defect classification

Author:

Jung Jason J.

Funder

Korean government

Publisher

Elsevier BV

Subject

Artificial Intelligence,Computer Science Applications,General Engineering

Reference14 articles.

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2. Cheon, S., & Zeigler, B. P. (2007). Experimental frame structuring and aggregation of source data: Application to us climate normals. In Proceedings of the Spring Simulation Multiconference 2007 (SpringSim’07), Society for Computer Simulation International, Norfolk, Virginia, (pp. 243–248).

3. Statistical methods for visual defect metrology;Cunningham;IEEE Transactions on Semiconductor Manufacturing,1998

4. Pattern recognition of bit fail maps;Faucher,1983

5. Fukushima, T., Narazaki, H. & Konishi, M. (1999). A method of feature extraction from an image for quality analysis, In the Proceedings of 1999 IEEE International Conference on Systems, Man, and Cybernetics (SMC ’99), Tokyo, Japan, IEEE Computer Society, (pp. 952–957).

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2. A generalised uncertain decision tree for defect classification of multiple wafer maps;International Journal of Production Research;2019-07-10

3. A Regularized Singular Value Decomposition-Based Approach for Failure Pattern Classification on Fail Bit Map in a DRAM Wafer;IEEE Transactions on Semiconductor Manufacturing;2015-02

4. Horizontal Search Method for Wikipedia Category Grouping;2012 IEEE International Conference on Green Computing and Communications;2012-11

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