A generalised uncertain decision tree for defect classification of multiple wafer maps-Reference-Cited by-同舟云学术

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A generalised uncertain decision tree for defect classification of multiple wafer maps

Published:2019-07-10 Issue:9 Volume:58 Page:2805-2821
ISSN:0020-7543
Container-title:International Journal of Production Research
language:en
Short-container-title:International Journal of Production Research

Author:

Kim Byunghoon¹²,Jeong Young-Seon¹³,Tong Seung Hoon⁴,Jeong Myong K.¹

Affiliation:

1. Department of Industrial and Systems Engineering, Rutgers University, New Jersey, NJ, USA

2. Department of Industrial and Management Engineering, Hanyang University-Erica Campus, Ansan, Republic of Korea

3. Department of Industrial Engineering, Chonnam National University, Gwangju, Republic of Korea

4. Department of Quality Assurance, Memory Business, Samsung Electronics, Hwasung, Korea

Funder

Hanyang University

National Research Foundation of Korea

Ministry of Education of the Republic of Korea

Publisher

Informa UK Limited

Subject

Industrial and Manufacturing Engineering,Management Science and Operations Research,Strategy and Management

Link

https://www.tandfonline.com/doi/pdf/10.1080/00207543.2019.1637035

Reference28 articles.

1. Managing and Mining Uncertain Data

2. A Survey of Uncertain Data Algorithms and Applications

3. Data mining for improving a cleaning process in the semiconductor industry

4. Analysing semiconductor manufacturing big data for root cause detection of excursion for yield enhancement

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4. Hyperparameter optimization for convolutional neural network by opposite-based particle swarm optimization and an empirical study of photomask defect classification;Applied Soft Computing;2023-11

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