A framework for detecting unknown defect patterns on wafer bin maps using active learning

Author:

Shin Jin-SuORCID,Kim Min-JooORCID,Lee Dong-HeeORCID

Funder

National Research Foundation of Korea

Ministry of Science, ICT and Future Planning

Publisher

Elsevier BV

Reference35 articles.

1. Clustering high dimensional data;Assent;Wiley Interdisciplinary Reviews: Data Mining and Knowledge Discovery,2012

2. Supervised contrastive learning for wafer map pattern classification;Bae;Engineering Applications of Artificial Intelligence,2023

3. Wafer classification using support vector machines;Baly;IEEE Transactions on Semiconductor Manufacturing,2012

4. A systematic review of deep learning for silicon wafer defect recognition;Batool;IEEE Access,2021

5. Active learning for data streams: A survey;Cacciarelli;Machine Learning,2024

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