Design of a MEMS micromirror actuated by electrostatic repulsive force

Author:

Hu Fangrong,Tang Yalu,Qian Yixian

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference21 articles.

1. Characterization of a MEMS-based pulse-shaping device in the deep ultraviolet;Rondi;Appl. Phys. B,2009

2. Two dimensional optical micro-scanner on silicon technology;Molar-Velazquez;Optik,2010

3. Fast 3D in vivo swept-source optical coherence tomography using a two-axis MEMS scanning micromirror;Karthik Kumar;J. Opt. A: Pure Appl. Opt.,2008

4. Design and development of a 331-segment tip–tilt–piston mirror array for space-based adaptive optics;Jason;Sens. Actuators A,2007

5. Adaptive optic correction using microelectromechanical deformable mirrors;Julie;Opt. Eng.,2002

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