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Spatial resolution of apertureless metal-coated fiber tip for NSOM lithography determined by tip-to-tip scan

  • Published:2013-07 Issue:14 Volume:124 Page:1971-1973
  • ISSN:0030-4026
  • Container-title:Optik
  • language:en
  • Short-container-title:Optik

Author:

Kubicova I.,Pudis D.,Suslik L.,Skriniarova J.

Funder

Slovak National Grant Agency

European Community

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference18 articles.

1. Scanning near-field optical lithography;Wegscheider;Thin Solid Films,1995

2. Shape and size variations during nanopatterning of photoresist using near-field scanning optical microscope;Kwon;Ultramicroscopy,2005

3. Recent developments in nanofabrication using scanning near-field optical microscope lithography;Tseng;Opt. Laser Technol.,2007

4. On Bethe's theory of diffraction by small holes;Bouwkamp;Philips Res. Rep.,1950

5. Light confinement in scanning near-field optical microscopy;Novotny;Ultramicroscopy,1995

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