Shape and size variations during nanopatterning of photoresist using near-field scanning optical microscope
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference13 articles.
1. Apertureless optical near-field fabrication using an atomic force microscope on photoresists
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4. Near-field optical lithography of a conjugated polymer
5. Near-field optical patterning on azo-hybrid sol–gel films
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2. Lithographic technologies suitable for PhC patterning and optical properties of patterned LED surfaces;Optik;2017-08
3. Characterization of Line Nanopatterns on Positive Photoresist Produced by Scanning Near-Field Optical Microscope;Journal of Nanomaterials;2015
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