Influence of parameters on the surface roughness of the CO2 laser polished fused silica glass-Reference-Cited by-同舟云学术

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Influence of parameters on the surface roughness of the CO2 laser polished fused silica glass

Published:2021-12 Issue: Volume:248 Page:168044
ISSN:0030-4026
Container-title:Optik
language:en
Short-container-title:Optik

Author:

Lu Guanghua,Li Xiaopeng,Yan Dejun,Wang Dasen,Peng Yong,Wang Kehong

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference15 articles.

1. Formation mechanism of a smooth, defect-free surface of fused silica optics using rapid CO2 laser polishing;Zhao;Int. J. Extrem. Manuf.,2019

2. Laser micromachining of glass, silicon, and ceramics;Rihakova;Adv. Mater. Sci. Eng.,2015

3. Fabrication of a high-quality axicon by femtosecond laser abaltion and CO2 laser polishing for quasi-bessel beam generation;Schwarz;Opt. Express,2018

4. Fabrication of cylindrical lenses by combining ultrashort pulsed laser and CO2 laser;Schwarz;J. Laser Micro/Nanoeng.,2017

5. NIF optical materials and fabrication technologies: an overview;Campbell;Proc. SPIE-Int. Soc. Opt. Eng.,2004

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Particles Manipulation to Improve Removal Efficiency of Fused Silica in Chemical Mechanical Polishing;Silicon;2023-06-20

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