Cc, Cs, and parasitic correction in quadrupole probe-forming lenses
Author:
Funder
Nanobeam Corporation for Design
Publisher
Elsevier BV
Subject
Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference24 articles.
1. Aberrations;Hawkes,2009
2. Quadrupoles in Electron lens Design;Hawkes,1970
3. History of direct aberration correction;Rose,2008
4. Aberration correction in a low voltage SEM by a multipole corrector;Zach;Nucl. Instr. Meth. Phys. Res.,1995
5. Experiments with quadrupole lenses in a scanning microscope;Crewe;J. Appl. Phys.,1967
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