Abstract
AbstractElimination of the electrostatic objective lens and alternative use of a Cc- and Cs-corrected quadrupole doublet may increase the useful working distance of the helium microscope, improve its resolution from 3 to 0.3 Å, and improve its optimum convergence angle from 0.4 to 4 mrad.
Publisher
Cambridge University Press (CUP)
Cited by
3 articles.
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1. Roadmap for focused ion beam technologies;Applied Physics Reviews;2023-12-01
2. Ion Microscopy;Springer Handbook of Microscopy;2019
3. Helium Ion Microscopy for Two-Dimensional Materials;Helium Ion Microscopy;2016