Aberration correction and its automatic control in scanning electron microscopes-Reference-Cited by-同舟云学术

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Aberration correction and its automatic control in scanning electron microscopes

Published:2005-09 Issue:9 Volume:116 Page:438-448
ISSN:0030-4026
Container-title:Optik
language:en
Short-container-title:Optik

Author:

Uno Shinobu,Honda Kazuhiro,Nakamura Natsuko,Matsuya Miyuki,Zach Joachim

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference12 articles.

1. Über einige Fehler von Elektronenlinsen;Scherzer;Z. Phys.,1936

2. P.W. Hawkes, E. Kasper, Principles of Electron Optics, vol. 2, Academic Press, London, 1989, pp. 859–863.

3. J. Zach, Aberration correction in a low voltage SEM by a multipole corrector, Proc. CPO4 (1994) 218–219.

4. Aberration correction in a low voltage SEM by a multipole corrector;Zach;Nucl. Instrum. Methods Phys. Res. A,1995

5. Abbildungseigenschaften sphärisch korrigierter elektronenoptischer Achromate;Rose;Optik,1971

Cited by 27 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Notes and References;Principles of Electron Optics, Volume 4;2022

2. Aberration-corrected focused ion beam for time-of-flight secondary neutral mass spectrometry;Applied Physics Express;2019-07-24

3. Aberration Correctors, Monochromators, Spectrometers;Springer Handbook of Microscopy;2019

4. Design for an aberration corrected scanning electron microscope using miniature electron mirrors;Ultramicroscopy;2018-06

5. Notes and References;Principles of Electron Optics;2018

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