Studies on the influence of sputtering power on amorphous carbon films deposited by pulsed unbalanced magnetron sputtering-Reference-Cited by-同舟云学术

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Studies on the influence of sputtering power on amorphous carbon films deposited by pulsed unbalanced magnetron sputtering

Published:2016-03 Issue:5 Volume:127 Page:2512-2515
ISSN:0030-4026
Container-title:Optik
language:en
Short-container-title:Optik

Author:

Dai H.Y.,Zhan C.,Du J.

Funder

National Natural Science Foundation of China

Zhengzhou Administration of Science and Technology of Henan Province of China

Youth Backbone Teachers Project of Henan Province and Zhengzhou University of Light Industry

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference16 articles.

1. Diamond-like amorphous carbon;Robertson;Mater. Sci. Eng. R: Rep.,2002

2. 60 Years of DLC coatings: Historical highlights and technical review of cathodic arc processes to synthesize various DLC types, and their evolution for industrial applications;Vetter;Surf. Coat. Technol.,2014

3. Role of base pressure on the structural and nano-mechanical properties of metal/diamond-like carbon bilayers;Dwivedi;Appl. Surf. Sci.,2013

4. Influence of PECVD parameters on the properties of diamond-like carbon films;Caschera;Thin Solid Films,2011

5. Panwar Correlation of sp3 and sp2 fraction of carbon with electrical, optical and nano-mechanical properties of argon-diluted diamond-like carbon films;Dwivedi;App. Surf. Sci.,2011

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1. The Amorphous Carbon Thin Films Synthesized by Gas Injection Magnetron Sputtering Technique in Various Gas Atmospheres;Coatings;2023-04-25

2. Effect of W-doping on the structure and properties of DLC films prepared by combining physical and chemical vapor deposition;Diamond and Related Materials;2023-02

3. Design of thin DLC/TiO2 film interference coatings on glass screen protector using a neon–argon-based gas injection magnetron sputtering technique;Diamond and Related Materials;2022-03

4. Anti-reflection for monocrystalline silicon from diamond-like carbon films deposited by magnetron sputtering;Materials Research Express;2021-09-01

5. Influences of target power and pulse width on the growth of diamond-like/graphite-like carbon coatings deposited by high power impulse magnetron sputtering;Diamond and Related Materials;2021-01

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