Design and analysis for the flexible support structure of high precision lens assembly-Reference-Cited by-同舟云学术

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Design and analysis for the flexible support structure of high precision lens assembly

Published:2018-12 Issue: Volume:175 Page:228-236
ISSN:0030-4026
Container-title:Optik
language:en
Short-container-title:Optik

Author:

Gao Yan^ORCID,Zhang Bao

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference18 articles.

1. Supporting structure of 620mm thin primary mirror and its active surface correction;Chen;Opt. Precis. Eng.,2011

2. Opto-Mechanical Systems Design;Yoder,2008

3. Performance index analysis of the support of lithographic lens with multi flexural bracket;Peng;Opto-Electron. Eng.,2013

4. Design and analysis for the high-precision lens flexible structure of lithography objective lens;Hua;Opto-Electron. Eng.,2013

5. Optimal design of cam structure of zoom lens;Wang;Opt. Precis. Eng.,2010

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1. KrF深紫外光刻投影物镜光机热集成分析与优化;Acta Optica Sinica;2024

2. Design and analysis of adaptive flexible support for cold optical lens;Seventh Asia Pacific Conference on Optics Manufacture and 2021 International Forum of Young Scientists on Advanced Optical Manufacturing (APCOM and YSAOM 2021);2022-02-15

3. Multi-Objective Parameter Optimization of Flexible Support System of Optical Mirror;Applied Sciences;2021-08-31

4. High Resolution Imaging Camera (HiRIC) on China’s First Mars Exploration Tianwen-1 Mission;Space Science Reviews;2021-03-29

5. Scalability of precision design principles for machines and instruments;CIRP Annals;2021

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