Study of initiation and development of local oxidation phenomena during anodizing of SiC
Author:
Publisher
Elsevier BV
Subject
Electrochemistry
Reference18 articles.
1. Ultrahigh-quality silicon carbide single crystals;Nakamura;Nature,2004
2. A survey of wide bandgap power semiconductor devices;Millán;IEEE Trans. Power Electron.,2014
3. Wide-bandgap semiconductor materials: for their full bloom;Fujita;Jpn. J. Appl. Phys.,2015
4. Electro-chemical mechanical polishing of silicon carbide;Li;J. Electron. Mater.,2004
5. Electro-chemical mechanical polishing of single-crystal SiC using CeO2 slurry;Deng;Electrochem. Commun.,2015
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