Electropolishing of n-type 3C-polycrystalline silicon carbide
Author:
Publisher
Elsevier BV
Subject
Electrochemistry
Reference19 articles.
1. A review of the structure of silicon carbide
2. Silicon carbide as a new MEMS technology
3. Silicon carbide MEMS for harsh environments
4. Chemomechanical Polishing of Silicon Carbide
5. Advances in silicon carbide science and technology at the micro- and nanoscales
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