Selective spatial atomic layer deposition of Cu, Cu2O, and CuO thin films in the open air: reality or fiction?
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Colloid and Surface Chemistry,Polymers and Plastics,Biomaterials,Electronic, Optical and Magnetic Materials,Catalysis
Reference78 articles.
1. Photoemission-based microelectronic devices;Forati;Nat. Commun.,2016
2. 2D organic materials for optoelectronic applications;Yang;Adv. Mater.,2018
3. Opportunities and challenges for spintronics in the microelectronics industry;Dieny;Nat. Electron.,2020
4. Manufacturing of 3D multifunctional microelectronic devices: challenges and opportunities;Guo;NPG Asia Mater.,2019
5. The application of atomic layer deposition for metallization of 65 nm and beyond;Kim;Surf. Coating. Technol.,2006
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