Position-controlled marker formation by helium ion microscope for aligning a TEM tomographic tilt series
Author:
Publisher
Elsevier BV
Subject
Cell Biology,Structural Biology,General Physics and Astronomy,General Materials Science
Reference9 articles.
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2. Fabrication of marker area to align TEM tomographic tilt series of rod-shaped specimens;Hayashida;Micron,2011
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1. A review of defect engineering, ion implantation, and nanofabrication using the helium ion microscope;Beilstein Journal of Nanotechnology;2021-07-02
2. Review Article: Advanced nanoscale patterning and material synthesis with gas field helium and neon ion beams;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2017-05
3. Characterization and Fabrication of Nano-Device Materials by Helium Ion Microscopy Technology;Hyomen Kagaku;2015
4. Nano-dot markers for electron tomography formed by electron beam-induced deposition: Nanoparticle agglomerates application;Ultramicroscopy;2014-09
5. High-precision alignment of electron tomography tilt series using markers formed in helium-ion microscope;Micron;2013-07
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