Charging effects of SiO2 thin film on Si substrate irradiated by penetrating electron beam-Reference-Cited by-同舟云学术

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Charging effects of SiO2 thin film on Si substrate irradiated by penetrating electron beam

Published:2021-01 Issue: Volume:140 Page:102961
ISSN:0968-4328
Container-title:Micron
language:en
Short-container-title:Micron

Author:

Li Wei-Qin,Mu Chao-Yi

Funder

National Natural Science Foundation of China

Natural Science Basic Research Program of Shaanxi

Publisher

Elsevier BV

Subject

Cell Biology,Structural Biology,General Physics and Astronomy,General Materials Science

Reference27 articles.

1. Electron beam induced conductivity in polymethyl methacrylate, polymide, ans SiO2 thin films;Bai;J. Vac. Sci. Technol. B,2004

2. Suppressing second electron yield based on porous anodic alumina;Bai;Acta Phys. Sin.,2018

3. Effect of nanoclay concentration level on the electrical properties of polypropylene under electron irradiation in a SEM;Ben;J. Microsc.,2017

4. Study of temperature effects on the electrical behavior of polypropylene-clay nanocomposites submitted to electron beam irradiation in a SEM;Ben;Micron,2017

5. Investigations of Electron beam induced conductivity in silicon oxide thin films;Borisov;J. Surf. Investig. X-ray, Synchrotr. Neutron Techniq.,2010

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