Electron beam induced conductivity in polymethyl methacrylate, polyimide, and SiO[sub 2] thin films
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Published:2004
Issue:6
Volume:22
Page:2907
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ISSN:0734-211X
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Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
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language:en
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Short-container-title:J. Vac. Sci. Technol. B
Author:
Bai Min,Pease Fabian
Publisher
American Vacuum Society
Subject
General Engineering
Cited by
19 articles.
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