Messung des übergangswiderstandes zwischen metall und diffusionsschicht in Si-planarelementen
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference5 articles.
1. Electrical contacts to silicon
2. A Two-Dimensional Mathematical Analysis of the Diffused Semiconductor Resistor
3. Integrated Circuits;Warner,1965
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