Investigation of the SiSiO2 interface by surface inversion currents
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference25 articles.
1. Surface States on Silicon and Germanium Surfaces
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3. MOS Physics and Technology;Nicollian,1982
4. Electrochemical Charging of Thermal SiO2 Films by Injected Electron Currents
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1. Thin thermal SiO2 after NH3 or N2O plasma action under plasma-enhanced chemical vapor deposition conditions;Thin Solid Films;1994-12
2. Influence of U.V. radiation and source-to-bulk bias on the processes in the SiSiO2 inversion channel;Solid-State Electronics;1992-11
3. Surface breakdown and stability of high-voltage planar junctions;IEEE Transactions on Electron Devices;1991
4. Low temperature plasma nitridation of thin thermal SiO2 and a silicon surface with native oxide;Microelectronics Journal;1990-01
5. Plasma processing effects on O2-HCl grown Si-SiO2 structures;Solid-State Electronics;1989-07
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