The use of a four-point probe for profiling sub-micron layers
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
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5. Investigation of high concentration effects of Sb and P in silicon by combination of SIMS and TEM;Fresenius' Zeitschrift für analytische Chemie;1989-01
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