Subject
Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Cited by
21 articles.
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1. Thin-Film Evaporation Processes;Materials Science of Thin Films;2002
2. Etching technology;Technology of Integrated Circuits;2000
3. Use of a dynamic network for the TLM solution of diffusion problems;International Journal of Numerical Modelling: Electronic Networks, Devices and Fields;1998-09
4. Ätztechnik;Halbleiter-Elektronik;1996
5. Simulation of the effect of bulk vacancy diffusion on the shape of sputtered films deposited onto trenches and vias;Journal of Applied Physics;1995-09-15