Fabrication of planar silicon transistors without photoresist-Reference-Cited by-同舟云学术

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Fabrication of planar silicon transistors without photoresist

Published:1968-02 Issue:2 Volume:11 Page:261-266
ISSN:0038-1101
Container-title:Solid-State Electronics
language:en
Short-container-title:Solid-State Electronics

Author:

O'Keeffe T.W.,Handy R.M.

Publisher

Elsevier BV

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Reference6 articles.

1. ECS Spring Meeting;O'Keeffe,1965

2. IEEE Electron Devices Meeting;O'Keeffe,1966

3. ECS Fall Meeting;O'Keeffe,1966

4. T.W. O'Keeffe, Bombardment Induced Changes in Silicon Oxide and Nitride Layers, J. appl. Phys. Submitted

5. Effects of Radiation on Semiconductors;Vavilov,1965

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