An improved silicon p-channel MESFET with a BF2 implanted thin channel and ErSi2 gate

Author:

Tirén J.,Magnusson U.,Rosling M.,Bleichner H.,Berg S.

Publisher

Elsevier BV

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Reference8 articles.

1. Complementary silicon MESFET technology

2. Influence of silicon-sapphire interface defects on SOS MESFET behavior

3. Physics of Semiconductor Devices;Sze,1981

4. Metal Semiconductor Contacts;Rhoderic,1978

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