Measurement of resistivity and mobility in silicon epitaxial layers on a control wafer
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference7 articles.
1. Measurement of resistivity of silicon epitaxial layers by the three-point probe technique
2. Impurity Distribution in Epitaxial Silicon Films
3. Semiconductor sheet resistivity measurements on square samples
4. Electrical Properties of Silicon Containing Arsenic and Boron
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