Subject
Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference4 articles.
1. Plasma Chemistry in Electrical Discharges;McTaggart,1967
2. Techniques and applications of plasma chemistry;Bell,1974
3. Etching Characteristics of Silicon and its Compounds by Gas Plasma
4. Heinecke, Plasma etching of Al films at high rates. To be published.
Cited by
249 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献