Author:
Kim Jin O,Ho Kim Jung,Choi Sunghoon
Subject
Acoustics and Ultrasonics
Reference11 articles.
1. Morita K. Ultrasonic Cleaning, Kindai Henshu Ltd, Tokyo, 1989 (in Japanese).
2. Mechanisms of removal of micron-sized particles by high-frequency ultrasonic waves;Qi;IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control,1995
3. An experimental study of megasonic cleaning of silicon wafers;Busnaina;Journal of the Electrochemical Society,1995
4. Megasonic cleaning: A new cleaning and drying system for use in semiconductor processing;Mayer;Journal of Electronic Materials,1979
5. High-frequency ultrasonic cleaning tank utilizing oblique incidence;Hatano;IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control,1996
Cited by
25 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献